Advanced Thin Film Processes & Materials for FEOL & Interconnect Applications, 2010—2015

The semiconductor industry has relied on CVD and PVD technologies to meet much of the requirements in thin film depositions. Along with these process technologies, many standard materials, such as SiO2, Al and Ti, have been relied on to meet a majority of the industry's needs. However, now the industry is facing change with DRAM using ALD at 90 nm and converting to copper en masse at 45 nm, as well as low-κ materials, novel gates, and high-κ gate dielectrics all growing rapidly.

The third edition of this groundbreaking report focuses on the emerging applications that provide the highest growth opportunities. As illustrated below, the materials market is expected to double by 2013, even with severe pricing pressure and the economic downturn.

ALD market by Application ($M)

The new report reviews emerging applications for advanced ALD, PECVD, epi, ECD, PVD and spin-on films and provides materials forecasts by application to 2013. The major applications reviewed include: copper barrier & seed, low-k dielectrics, diffusion caps, STI, strain, PMD, high-K dielectrics, metal gates as well as capacitor high-k dielectrics and electrodes.

Report Contents

1. Executive Summary

• 2008—2013 Consumption of materials
• Growth rates by deposition technology
• Regional distribution of depositions

2. Methodology and Background

3. Forecast Drivers

• Segmentation by device type
• Review ITRS
• Map unit operations by device type

4. BEOL Deposition Technology

  • Review of applications:
    • Low-K
    • Barrier
    • Seeds
    • Caps
    • ECD
  • Device based analysis for 45 nm and 32 nm with insights to 32 nm

5. Assessment OF FEOL Deposition Technology

Review of applications:

• High-K capacitors
• Metal Gates
• High-K gate dielectrics
• Strain
• NAND FEOL Structures

6. Material Market Analysis and Forecasts, 2008—2013

By application and year in terms of value and volume:


7. Forecasts by Device Types

• Advanced Logic
• Logic
• Analog
• Discrete

8. Leading Suppiers & Business Assessment

• Leading suppliers by material
• Influence of tool producers
• Competitive review