2022 ESG Conference Agenda

2022 Electronic Specialty Gas Conference
Wednesday, October 19, 2022
Business Interface Conference & Market Overlap of Wet & Dry Processes
7:30 AM Breakfast
8:30 AM Welcome and Review of Today's Agenda Mike Corbett Linx Consulting
8:40 AM Keynote: Semiconductor Technology Roadmap - Dry & Wet Tension Points Scotten W Jones ICKnowledge
9:10 AM Is the Economy in Recession? And Does It Matter for Semiconductors? Duncan Meldrum Hilltop Economics
9:40 AM NIST Activities in the Semiconductor Agency James Maslar NIST
10:00 AM Semiconductor Industry Growth and Opportunities in Greater Phoenix Chris Camacho Greater Phoenix Economic Council
10:20 AM Break
10:50 AM Review of Gases and Chemicals by Process Module David Maloney Linx Consulting
11:20 AM Wet vs Dry Processing Challenges for Advanced Transistors Trace Hurd TEL
11:50 AM Strategies for Targeted Contaminants Removal in Gas and Liquid Filtration Jad Jaber Entegris
12:20 PM Session Closing Remarks Mike Corbett Linx Consulting
12:30 PM Lunch
Sustainability within the Semiconductor Industry
1:30 PM Session Introduction Mike Corbett Linx Consulting
1:45 PM Net-Zero Semiconductor Manufacturing: Investing in the Future Suresh Ramarajan Micron
2:30 PM Panel Discussion: Sustainability Taimur Burki
Ben Gross
Tracey Christiansen
James Amano, Moderator
Applied Materials
3:45 PM Break
4:15 PM ESG Sustainability via Materials Innovation and Process Improvement James Nehlsen EMD Electronics
4:45 PM Toward Sustainable Fab: Reducing Bulk Chemicals by SPM Reuse in Single-Wafer Process Applications Jim Snow Screen
5:30 PM Session Closing Remarks Mike Corbett Linx Consulting
Thursday, October 20, 2022
Market Trends and Analytics
7:15 AM Breakfast
8:15 AM Welcome and Review of Morning Agenda Mike Corbett Linx Consulting
8:25 AM Market Trends: Electronic Specialty Gases Andy Tuan Linx Consulting
8:50 AM Helium Market Trends and Expectations Phil Kornbluth Konbluth Helium Consulting
9:15 AM AIM Act: Hydrofluorocarbon Supply Challenges in 2024 and Beyond Adam Seymour Electronic Fluorocarbons
9:45 AM Break
10:15 AM Keynote: Challenges in Defectivity and Analytical Metrology for Next-Generation Semiconductor Nodes’ Processes Archita Sengupta Intel
11:00 AM Possibilities in Mid-Infrared Optical Technology for Monitoring Gas Gary Spingarn Hamamatsu
11:30 AM Direct Gas Sampling for Trace Metals Analysis by Inductively Coupled Plasma - Mass Spectrometry Katrina Visceglia Air Liquide
12:00 PM Session Closing Remarks Hugh Gotts Air Liquide
12:15 PM Lunch
Filtration/Purifcation (Contamination Control) and Vapor Phase Delivery
1:30 PM Session Introduction Mike Corbett Linx Consulting
1:45 PM Keynote: Filtration and Purification Impact on Yield, How They Look at Yield and Models Bill Miller Qualcomm
2:30 PM Purification of CO2 for Use in Semiconductor Manufacturing Sarah Vogt Entegris
3:00 PM Contamination Control in Specialty Gases Stanley Smith Linde
3:30 PM Break
4:00 PM Keynote: ALD & CVD Deposition Precursors and Gases for Various Metals, Metal Oxides/Nitrides and Silicon Based Dielectric Films Abhudaya Mishra ASM
4:30 PM Considerations for Vacuum and Abatement Systems John Makin Ebara
5:00 PM Advanced Metrology Considerations for Vapor Phase Materials Martin Mason Atonarp
5:30 PM Session Closing Remarks Mike Corbett Linx Consulting
6:30 PM Reception Hosted by
EMD Electronics
Friday, October 21, 2022
Facilitization Challenges and Future Developments
7:30 AM Breakfast
8:30 AM Welcome and Review of Morning Agenda Mike Corbett Linx Consulting
8:40 AM Keynote: Fab Sustainability - Opportunities and Challenges Monica Wright
Nathan Monosoff
Jacobs Engineering
9:25 AM EUV - Energy and Footprint Reduction in Vacuum and Abatement Systems Chris Jones Edwards Vacuum
9:55 AM SCIS Traceability Initiatives and Update Dalia Vernikovsky Applied Seals NA
10:25 AM Break
10:55 AM IRDS Gas Requirements Andreas Neuber Applied Materials
11:25 AM Closing Keynote: Advanced Analytics - Learnings from Pharma and Insights for SEMI Laura Matz Athinia
12:10 PM Closing Remarks Mike Corbett Linx Consulting
12:20 PM Lunch

Presentations will be posted at the end of the conference.

The Electronic Specialty Gas Conference 2022 is designed to be the premier event that supports the users, producers, process tools and critical infrastructure suppliers of electronic gases and gas phase materials.  The Conference provides a forum for key industry participants to discuss the current and next generation challenges that the users of ultra-high purity gases and gas
phase materials uniquely face.