CMP Technologies and Markets

CMP Technologies and Markets 2021

The tenth edition of CMP Technologies and Markets identifies and focus on growth drivers for CMP applications and forecasts consumables demand to 2026.

Driven by a strong 2021, the CMP slurry and pad market has finally returned to higher growth rates across both 200mm and 300mm platforms. In addition, new applications for CMP are emerging also helping to drive growth. One key emerging application is in 3DNAND and shown below:

CMP Staircase

In addition, the positive impact of new CMP applications in both planar and multi-gate structures as well as 3D NAND are positively impacting the demand for CMP slurries and pads. Novel materials such as cobalt liners, bulk cobalt fills and possibly new barrier materials will lead to new materials being planarized.

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Report Contents

1. Executive Summary
  • 2021-2026 Consumption of materials
  • Growth rates by technology
2. Methodology
3. Forecast Drivers
  • Segmentation by device type
  • Introductions of EUV
  • Review Roadmaps
  • Map unit operations by device type
4. Copper, Barrier, Tungsten, Cobalt, Moly, Ru
  • Review of Applications
5. STI, Oxide and Poly
  • Review of Applications
6. Advanced FEOL, Logic and Emerging Memory
  • FEOL FinFet
  • GAA
  • 3D NAND
  • CrossPoint
  • MRAM
  • Other
7. CMP Materials Market Analysis and Forecasts 2021-2026
  • Oxide/Poly
  • STI
  • Tungsten
  • Copper
  • Barrier
  • Cobalt
  • Emerging FEOL
8. Leading Suppliers & Business Assessment
  • Leading suppliers by materials
  • Supplier shares
  • Competitive review
9. Business Analysis