SPCC 2017 Technical Program 10:00 AM – 5:00 PM: Post CMP Cleaning Conference 5:00 PM – 8:00 PM: Pre-registration and networking —Location: TBD 7:30 – 9AM: Breakfast — Location—TBD SESSION 1: Keynote/BEOL—Location—TBD Session Chair: Joel Barnett 9:00 AM: Introductions, Day 1 Welcome, Conference Overview — Joel Barnett/Mark Thirsk 9:15 AM: KEYNOTE—Wafer Cleanliness: Challenges from an Increasingly Complex Fab […]